E07700 - SEMI E77 - マスフローコントローラの換算率の代用ガス使用による計算方法 StdVol-Facilities The ‘initial dry-down’ situation

Name: E07700 - SEMI E77 - マスフローコントローラの換算率の代用ガス使用による計算方法 StdVol-Facilities The ‘initial dry-down’ situation
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Description

The ‘initial dry-down’ situation

SEMI E82-0302 (technical revision)

SEMI C93-0522 (technical revision)

The actual diameter of a 300 mm (nominal) silicon wafer may be less than 300 mm due to material removal via edge trim

1-0324 (technical revision)

E07700 - SEMI E77 - マスフローコントローラの換算率の代用ガス使用による計算方法 StdVol-Facilities The ‘initial dry-down’ situationglobal Gases Committee2010430global Audits and Reviews Subcommittee20106www. semi. org1998200411 1MFCMFC Referenced SEMI Standards None.

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